Device for coating of substrates

专利名称：Device for coating of substrates发明人：MUENZ, WOLF-DIETER, DR.,HAUZER,

FRANSISCUS J.M.,BUIL, BOUDEWIJNJ.A.,SCHULZE, DIETMAR, DR.,TIETEMA, ROEL

申请号：EP91106331.1申请日：19910419公开号：EP0459137A2公开日：19911204

专利附图：

摘要：An arc-magnetron is described, in which an edge magnet arrangement can bedisplaced in the axial direction relative to a centre-pole permanent magnet, which is

preferably fitted in a fixed position, such that cathode sputtering and/or an arc dischargecan be implemented irrespective of the relative position of the edge magnetarrangement and the centre pole magnet. ……

申请人：HAUZER HOLDING B.V.

地址：GROETHOFSTRAAT 27; NL-5900 AE VENLO,Groethofstraat 27 NL-5900 AE VenloNL

国籍：NL

代理机构：Dipl.-Phys.Dr. Manitz Dipl.-Ing. Finsterwald Dipl.-Ing. Grämkow Dipl.Chem.Dr.Heyn Dipl.Phys. Rotermund Morgan, B.Sc.(Phys.)

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